{"id":108,"date":"2025-02-03T10:56:38","date_gmt":"2025-02-03T01:56:38","guid":{"rendered":"https:\/\/www.3dicrl.com\/?p=108"},"modified":"2025-02-03T10:56:38","modified_gmt":"2025-02-03T01:56:38","slug":"iedm24-tsmc%e3%81%aecpo%e6%8a%80%e8%a1%93%e3%81%ae%e9%80%b2%e5%b1%95%ef%bc%9a%e3%83%95%e3%82%a9%e3%83%88%e3%83%8b%e3%82%af%e3%82%b9%e3%81%a8%e5%8d%8a%e5%b0%8e%e4%bd%93%e8%a3%bd%e9%80%a0%e3%81%ae","status":"publish","type":"post","link":"https:\/\/www.3dicrl.com\/?p=108","title":{"rendered":"IEDM'24  TSMC\u306eCPO\u6280\u8853\u306e\u9032\u5c55\uff1a\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u3068\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u878d\u5408"},"content":{"rendered":"\n<h2 class=\"wp-block-heading\">\u306f\u3058\u3081\u306b<\/h2>\n\n\n\n<p>\u30c7\u30fc\u30bf\u901a\u4fe1\u306e\u9700\u8981\u304c\u7206\u767a\u7684\u306b\u5897\u52a0\u3059\u308b\u4e2d\u3001\u5f93\u6765\u306e\u9285\u914d\u7dda\u6280\u8853\u3067\u306f\u5e2f\u57df\u5e45\u3084\u6d88\u8cbb\u96fb\u529b\u306e\u5236\u7d04\u304c\u9855\u5728\u5316\u3057\u3066\u3044\u307e\u3059\u3002TSMC\u306f\u3001\u3053\u306e\u8ab2\u984c\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\uff08SiPh\uff09\u3092\u6d3b\u7528\u3057\u305fCo-Packaged Optics\uff08CPO\uff09\u6280\u8853\u3092\u958b\u767a\u3057\u3001\u6b21\u4e16\u4ee3\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u3084HPC\uff08High-Performance Computing\uff09\u5411\u3051\u306e\u30d6\u30ed\u30fc\u30c9\u30d0\u30f3\u30c9\u30fb\u30aa\u30d7\u30c6\u30a3\u30ab\u30eb\u30a8\u30f3\u30b8\u30f3\u3092\u76ee\u6307\u3057\u3066\u3044\u307e\u3059\u3002\u672c\u8a18\u4e8b\u3067\u306f\u3001TSMC\u306e\u6700\u65b0CPO\u6280\u8853\u306e\u6280\u8853\u7684\u512a\u4f4d\u6027\u306b\u3064\u3044\u3066\u3001\u5177\u4f53\u7684\u306a\u30c7\u30fc\u30bf\u3092\u4ea4\u3048\u3066\u89e3\u8aac\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1. \u5148\u9032\u7684\u306a\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u96c6\u7a4d\u6280\u8853<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">1.1 COUPE\u3068CoWoS\u306b\u3088\u308b\u9ad8\u96c6\u7a4d\u5316<\/h3>\n\n\n\n<p>TSMC\u306eCPO\u6280\u8853\u3067\u306f\u3001**COUPE\uff08Compact Universal Photonic Engine\uff09<strong>\u3068<\/strong>CoWoS\uff08Chip-on-Wafer-on-Substrate\uff09**\u3092\u6d3b\u7528\u3057\u3001\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u96c6\u7a4d\u56de\u8def\uff08PIC\uff09\u3068\u96fb\u5b50\u96c6\u7a4d\u56de\u8def\uff08EIC\uff09\u3092\u7d71\u5408\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30b7\u30b9\u30c6\u30e0\u306e\u5c0f\u578b\u5316\u3068\u4fe1\u53f7\u4f1d\u9001\u52b9\u7387\u306e\u5411\u4e0a\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5149\u640d\u5931\u306e\u4f4e\u6e1b<\/strong>: O-band\u30b0\u30ec\u30fc\u30c6\u30a3\u30f3\u30b0\u30ab\u30d7\u30e9\uff08GC\uff09\u306e\u7d50\u5408\u640d\u5931\u306f0.3dB\u306b\u6291\u3048\u3089\u308c\u3001\u5916\u90e8\u30d5\u30a1\u30a4\u30d0\u30fc\u3068\u306e\u7d50\u5408\u7cbe\u5ea6\u306f\u00b110\u03bcm\u4ee5\u5185\u306b\u5236\u5fa1\u3002<\/li>\n\n\n\n<li><strong>\u96fb\u6c17\u4fe1\u53f7\u306e\u6700\u9069\u5316<\/strong>: SoIC\uff08System on Integrated Chip\uff09\u3092\u7528\u3044\u305fEIC-PIC\u9593\u306e\u96fb\u6c17\u63a5\u7d9a\u306b\u3088\u308a\u3001\u9285\u914d\u7dda\u306b\u3088\u308b\u4fe1\u53f7\u6e1b\u8870\u3092\u4f4e\u6e1b\u3002<\/li>\n\n\n\n<li><strong>\u30a8\u30c3\u30b8\u30ab\u30d7\u30ea\u30f3\u30b0\u3068\u306e\u6bd4\u8f03\u512a\u4f4d\u6027<\/strong>: \u30a8\u30c3\u30b8\u30ab\u30d7\u30ea\u30f3\u30b0\u306f\u3001\u30d5\u30a1\u30a4\u30d0\u30fc\u6570\u304c\u5236\u9650\u3055\u308c\u308b\u4e0a\u306b\u3001\u30d5\u30a1\u30a4\u30d0\u30fc\u306e\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u7cbe\u5ea6\u304c\u6975\u3081\u3066\u9ad8\u304f\u8981\u6c42\u3055\u308c\u308b\u305f\u3081\u3001\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u304c\u8907\u96d1\u5316\u3059\u308b\u3002\u5bfe\u7167\u7684\u306b\u3001\u30b0\u30ec\u30fc\u30c6\u30a3\u30f3\u30b0\u30ab\u30d7\u30e9\uff08GC\uff09\u306f\u3001\u591a\u5217\u30d5\u30a1\u30a4\u30d0\u30fc\u63a5\u7d9a\u304c\u53ef\u80fd\u3067\u3042\u308a\u3001\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u8a31\u5bb9\u7bc4\u56f2\u304c\u5e83\u3044\u305f\u3081\u3001\u5927\u898f\u6a21\u96c6\u7a4d\u306b\u9069\u3057\u3066\u3044\u308b\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">1.2 \u5148\u9032\u7684\u306a\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9<\/h3>\n\n\n\n<p>TSMC\u306f300mm SOI\uff08Silicon-On-Insulator\uff09\u30a6\u30a7\u30fc\u30cf\u3092\u7528\u3044\u305f\u6700\u5148\u7aef\u306eCMOS\u6280\u8853\u3092\u5c0e\u5165\u3057\u3001PIC\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u78ba\u7acb\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u4ee5\u4e0b\u306e\u7cbe\u5ea6\u3092\u76ee\u6307\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u5236\u5fa1<\/strong>: CD\uff08Critical Dimension\uff09\u5909\u52d53\u03c3 = 2nm\u4ee5\u4e0b\uff08WiW\u304a\u3088\u3073WtW\uff09\u3002<\/li>\n\n\n\n<li><strong>\u5149\u5c0e\u6ce2\u8def\u640d\u5931<\/strong>: \u30b7\u30f3\u30b0\u30eb\u30e2\u30fc\u30c9WG\u306f0.67dB\/cm\u3001\u30de\u30eb\u30c1\u30e2\u30fc\u30c9WG\u306f0.20dB\/cm\u3002<\/li>\n\n\n\n<li><strong>\u30b7\u30ea\u30b3\u30f3\u30ca\u30a4\u30c8\u30e9\u30a4\u30c9\uff08SiN\uff09\u6d3b\u7528<\/strong>: SiN WG\u306f0.01dB\/cm\u4ee5\u4e0b\u306e\u4f1d\u642c\u640d\u5931\u3092\u76ee\u6307\u3057\u3001\u9ad8\u51fa\u529b\uff08300mW\u8d85\uff09\u3067\u3082\u52a3\u5316\u3057\u306a\u3044\u5b89\u5b9a\u6027\u3092\u78ba\u4fdd\u3002<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">2. \u9ad8\u901f\u30fb\u4f4e\u6d88\u8cbb\u96fb\u529b\u306e\u30a2\u30af\u30c6\u30a3\u30d6\u30c7\u30d0\u30a4\u30b9<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 \u30de\u30a4\u30af\u30ed\u30ea\u30f3\u30b0\u30e2\u30b8\u30e5\u30ec\u30fc\u30bf\uff08MRM\uff09\u306e\u9ad8\u6027\u80fd\u5316<\/h3>\n\n\n\n<p>MRM\u306f\u3001\u4f4e\u6d88\u8cbb\u96fb\u529b\u3067\u306e\u4fe1\u53f7\u5909\u8abf\u306b\u512a\u308c\u305f\u30c7\u30d0\u30a4\u30b9\u3067\u3059\u304c\u3001\u88fd\u9020\u30d0\u30e9\u3064\u304d\u3084\u6e29\u5ea6\u5909\u52d5\u306b\u654f\u611f\u3067\u3059\u3002TSMC\u306f\u4ee5\u4e0b\u306e\u6280\u8853\u3067MRM\u306e\u6027\u80fd\u5411\u4e0a\u3092\u76ee\u6307\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5909\u8abf\u5e2f\u57df\u5e45<\/strong>: 63GHz\uff086dB\u633f\u5165\u640d\u5931\uff09\u300176GHz\uff084dB\u633f\u5165\u640d\u5931\uff09<\/li>\n\n\n\n<li><strong>\u71b1\u30c1\u30e5\u30fc\u30cb\u30f3\u30b0\u6700\u9069\u5316<\/strong>: CD\u5236\u5fa1\u7cbe\u5ea6\u30921.44nm\uff083\u03c3\uff09\u4ee5\u5185\u306b\u7dad\u6301\u3057\u3001\u71b1\u6d88\u8cbb\u3092\u6700\u5c0f\u9650\u306b\u6291\u5236\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 \u9ad8\u901f\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\uff08Ge\uff09\u30d5\u30a9\u30c8\u30c7\u30a3\u30c6\u30af\u30bf<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5fdc\u7b54\u901f\u5ea6<\/strong>: 110GHz\uff083dB\u5e2f\u57df\u3001200\u03bcA\u5149\u96fb\u6d41\uff09\u300150GHz\u8d85\uff081mA\uff09<\/li>\n\n\n\n<li><strong>\u9ad8\u611f\u5ea6<\/strong>: -1.5V\u30d0\u30a4\u30a2\u30b9\u6642\u306e\u6697\u96fb\u6d41\u306f4.5nA\u3001\u8cac\u4efb\u5ea6\uff08Responsivity\uff09\u306f1A\/W\uff085mW\u5165\u529b\u6642\uff09<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3. \u8a2d\u8a08\u8a55\u4fa1\u3092\u53ef\u80fd\u306b\u3059\u308bPDK\u306e\u6574\u5099<\/h2>\n\n\n\n<p>TSMC\u306f\u3001O\u30d0\u30f3\u30c9\u306e\u30d5\u30a9\u30c8\u30cb\u30c3\u30af\u30c7\u30d0\u30a4\u30b9\u30e9\u30a4\u30d6\u30e9\u30ea\u3092\u542b\u3080**PDK\uff08Process Design Kit\uff09**\u3092\u958b\u767a\u3057\u3001\u9867\u5ba2\u304c\u8a2d\u8a08\u8a55\u4fa1\u3092\u884c\u3048\u308b\u74b0\u5883\u3092\u6574\u5099\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306ePDK\u306b\u306f\u3001<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u30d1\u30e9\u30e1\u30fc\u30bf\u5316\u3055\u308c\u305f\u30bb\u30eb\uff08p-cell\uff09<\/strong><\/li>\n\n\n\n<li><strong>S\u30d1\u30e9\u30e1\u30fc\u30bf\u30e2\u30c7\u30eb\uff0825-105\u00b0C\u5bfe\u5fdc\uff09<\/strong><\/li>\n\n\n\n<li><strong>RC\u7279\u6027\u306e\u30e2\u30c7\u30eb\u5316<\/strong><\/li>\n\n\n\n<li><strong>Verilog-A\u30b5\u30dd\u30fc\u30c8\u306b\u3088\u308b\u56de\u8def\u8a2d\u8a08<\/strong><\/li>\n\n\n\n<li><strong>\u30ec\u30a4\u30a2\u30a6\u30c8\u8a2d\u8a08\u30eb\u30fc\u30eb\u30c1\u30a7\u30c3\u30af\uff08DRC\uff09\u3068\u30dd\u30fc\u30c8\u63a5\u7d9a\u691c\u8a3c<\/strong><\/li>\n<\/ul>\n\n\n\n<p>\u306a\u3069\u304c\u542b\u307e\u308c\u3066\u304a\u308a\u3001\u8a2d\u8a08\u7cbe\u5ea6\u306e\u5411\u4e0a\u3068\u958b\u767a\u52b9\u7387\u306e\u6700\u9069\u5316\u304c\u53ef\u80fd\u3067\u3059\u3002\u3053\u306ePDK\u306e\u6574\u5099\u306b\u3088\u308a\u3001\u91cf\u7523\u3078\u5411\u3051\u305f\u5927\u304d\u306a\u4e00\u6b69\u304c\u8e0f\u307f\u51fa\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u53c2\u8003\u6587\u732e<\/h2>\n\n\n\n<p>[1] S.K. Yeh, et al., \"Silicon Photonics Platform for Next Generation Data Communication Technologies,\" TSMC, 2024. [2] H. Hsia, et al., \"EPIC-BOE: An Electronic-Photonic Chiplet Integration Technology with IC Processes for Broadband Optical Engine Applications,\" TSMC, 2024.<\/p>\n\n\n\n<p><strong>\u6ce8\u8a18<\/strong>: O-band\uff081260-1360nm\uff09\u306f\u3001\u4f4e\u5206\u6563\u3067\u4fe1\u53f7\u54c1\u8cea\u304c\u826f\u597d\u306a\u3053\u3068\u304b\u3089\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u3084\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u5411\u3051\u306e\u5149\u901a\u4fe1\u6280\u8853\u306b\u9069\u3057\u305f\u6ce2\u9577\u5e2f\u3067\u3042\u308b\u3002<\/p>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u306f\u3058\u3081\u306b \u30c7\u30fc\u30bf\u901a\u4fe1\u306e\u9700\u8981\u304c\u7206\u767a\u7684\u306b\u5897\u52a0\u3059\u308b\u4e2d\u3001\u5f93\u6765\u306e\u9285\u914d\u7dda\u6280\u8853\u3067\u306f\u5e2f\u57df\u5e45\u3084\u6d88\u8cbb\u96fb\u529b\u306e\u5236\u7d04\u304c\u9855\u5728\u5316\u3057\u3066\u3044\u307e\u3059\u3002TSMC\u306f\u3001\u3053\u306e\u8ab2\u984c\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\uff08SiPh\uff09\u3092\u6d3b\u7528\u3057\u305fCo-Packaged Opti [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"sns_share_botton_hide":"","vkExUnit_sns_title":"","_vk_print_noindex":"","sitemap_hide":"","_veu_custom_css":"","veu_display_promotion_alert":"common","vkexunit_cta_each_option":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-108","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"veu_head_title_object":{"title":"","add_site_title":""},"_links":{"self":[{"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=\/wp\/v2\/posts\/108","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=108"}],"version-history":[{"count":1,"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=\/wp\/v2\/posts\/108\/revisions"}],"predecessor-version":[{"id":109,"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=\/wp\/v2\/posts\/108\/revisions\/109"}],"wp:attachment":[{"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=108"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=108"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.3dicrl.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=108"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}